Metamaterials have electromagnetic properties not found in natural materials, and terahertz (THz) metamaterial functional devices have wide application prospects in biomolecular detection, medical imaging, and security inspection. In this paper, we used CiteSpace software to visually analyze references on THz metamaterial functional devices on the Web of Science from 2016—2023 to review the research progress and hot areas and predict their development prospects to provide a reference for staff engaged in related research. A total of 2159 closely related literature were retrieved for this analysis. The papers are analyzed and discussed separately in terms of the published literatures country, institution, author contribution, citation number, and keyword clustering. The research areas of THz functional devices in recent years are obtained, mainly including absorbers, filters, electromagnetically induced transparency, modulators, asymmetric transmission, wavefront modulation, coding metasurfaces, machine learning, biosensing, quantum entangled metasurfaces, etc. In the field of THz metamaterial functional devices, China publishes more than 50% of all articles, and three countries, the UK, China, and the USA, had the highest impact. By analyzing the collaboration network of research institutions, it is found that the top ten research institutions in terms of the number of publications are all Chinese institutions, among which Tianjin University occupies the first place regarding the number of publications. Through the co-occurrence analysis and co-citation analysis of the papers authors, the authors number of publications and influence can be counted respectively. To further study the research hotspots of THz functional devices, we conducted a cluster analysis of keywords and obtained 11 clusters, summarizing 5 key research areas. Finally, a pie chart of the distribution of research fields is given, and the development status of each field is analyzed in the form of a knowledge tree. The fields of absorbers, filters, modulators, and electromagnetically induced transparency have been studied maturely, the fields of biosensing, asymmetric transmission, and antennas are in the development stage and gradually matured, and machine learning and quantum entangled metasurfaces will become hot research topics in the future.