1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2University of Chinese Academy of Sciences, Beijing 100049, China
3Shanghai Industrial μTechnology Research Institute, Shanghai 201800, China
4School of Microelectronics, Shanghai University, Shanghai 200444, China
Zihao Yu, Lihao Wang, Yang Wang, Yichen Liu, Zhenyu Wu. Research Progress and Development Trend of Fast Steering Mirror for Satellite Laser Communication[J]. Laser & Optoelectronics Progress, 2023, 60(15): 1500003
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Zihao Yu, Lihao Wang, Yang Wang, Yichen Liu, Zhenyu Wu. Research Progress and Development Trend of Fast Steering Mirror for Satellite Laser Communication[J]. Laser & Optoelectronics Progress, 2023, 60(15): 1500003