• Laser & Optoelectronics Progress
  • Vol. 60, Issue 15, 1500003 (2023)
Zihao Yu1,2, Lihao Wang1, Yang Wang1, Yichen Liu1, and Zhenyu Wu1,2,3,4,*
Author Affiliations
  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Shanghai Industrial μTechnology Research Institute, Shanghai 201800, China
  • 4School of Microelectronics, Shanghai University, Shanghai 200444, China
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    DOI: 10.3788/LOP221610 Cite this Article Set citation alerts
    Zihao Yu, Lihao Wang, Yang Wang, Yichen Liu, Zhenyu Wu. Research Progress and Development Trend of Fast Steering Mirror for Satellite Laser Communication[J]. Laser & Optoelectronics Progress, 2023, 60(15): 1500003 Copy Citation Text show less
    Structure diagram of fast steering mirror (FSM)
    Fig. 1. Structure diagram of fast steering mirror (FSM)
    Structure diagram of high-bandwidth two-axis steering mirror (HBSM)[25]
    Fig. 2. Structure diagram of high-bandwidth two-axis steering mirror (HBSM)[25]
    Physical diagram of TNO FSM[26]
    Fig. 3. Physical diagram of TNO FSM[26]
    Structure diagram of V-931.01[28]
    Fig. 4. Structure diagram of V-931.01[28]
    Structure diagram of simulation control FSM[29]
    Fig. 5. Structure diagram of simulation control FSM[29]
    PAM30 piezoelectric FSM's platform[30]
    Fig. 6. PAM30 piezoelectric FSM's platform[30]
    S3 series piezoelectric pendulum[31]
    Fig. 7. S3 series piezoelectric pendulum[31]
    FSM structural model (left) and physical diagram (right) [32]
    Fig. 8. FSM structural model (left) and physical diagram (right) [32]
    FSM system model (left) and physical diagram (right) [33]
    Fig. 9. FSM system model (left) and physical diagram (right) [33]
    Deflection geometric graph (left)[34] and structure diagram (right)[35] of FSM
    Fig. 10. Deflection geometric graph (left)34 and structure diagram (right)35 of FSM
    Structure diagram of S34.T2S
    Fig. 11. Structure diagram of S34.T2S
    Structure diagram of A8L2.2[38]
    Fig. 12. Structure diagram of A8L2.2[38]
    Laser communication systems of Stanford University (left) and Massachusetts Institute of Technology (right) [23]
    Fig. 13. Laser communication systems of Stanford University (left) and Massachusetts Institute of Technology (right) [23]
    Structure diagram of S12237-03P[22]
    Fig. 14. Structure diagram of S12237-03P[22]
    Laser communication system of LaSEINE lab[22]
    Fig. 15. Laser communication system of LaSEINE lab[22]
    Photo of MEMS FSM test board (left) and scan curves in helix shape (right)
    Fig. 16. Photo of MEMS FSM test board (left) and scan curves in helix shape (right)
    Geometric relationship between FSM and beam when FSM rotates around a single axis
    Fig. 17. Geometric relationship between FSM and beam when FSM rotates around a single axis
    Company or research institutionDrive modeMirror diameter /mmAngle rangeClosed loop bandwidth /Hz
    Lincoln Laboratory of Massachusetts Institute of TechnologyVoice coil motor20±10 mrad104
    TNOVoice coil motor20±2°103
    Physik InstrumenteVoice coil motor25.4±35 mrad75
    Beihang UniversityVoice coil motor80±873 μrad
    Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of SciencesVoice coil motor50.8±26 mrad300
    CEDRATPiezoelectric ceramics27

    x axis ±2.1 mrad,

    y axis ±1.5 mrad

    Physik InstrumentePiezoelectric ceramics<19±2 mrad300
    Xi’an Jiaotong UniversityPiezoelectric ceramics20±52 mrad
    Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of SciencesPiezoelectric ceramics100±5 mrad300
    Shanghai Institute of Technical Physics,Chinese Academy of SciencesPiezoelectric ceramics

    Major axis 280,

    minor axis 90 elliptical

    Major axis ±3 mrad,

    minor axis ±2.1 mrad

    149
    Harbin Core Tomorrow Science & TechnologyPiezoelectric ceramics25±1.25 mrad250
    Mirrorcle TechnologiesMEMS2.4±100 mrad
    HamamatsuMEMS2.6±15°100
    Shanghai Institute of Microsystem and Information Technology,Chinese Academy of SciencesMEMS10±1.7 mrad500
    Table 1. Summary of FSMs' parameters
    Zihao Yu, Lihao Wang, Yang Wang, Yichen Liu, Zhenyu Wu. Research Progress and Development Trend of Fast Steering Mirror for Satellite Laser Communication[J]. Laser & Optoelectronics Progress, 2023, 60(15): 1500003
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