[1] MA Xiu-shui, FEI Ye-tai, CHEN Xiao-huai, et al. Research and Development of grating nanometer measurement [J]. Instrument Technique and Sensor, 2006(4): 53-55.

[2] WANG Yu-zhi, AI Hua, HAN Xu-dong. Extraction of Moiré Fringe Signal for Photoelectric Encoder Based on Grating Self-imaging [J]. Opto-Electronic Engineering, 2010, 36(1): 78-87.

[3] FAN Shu-wei, ZHOU Qing-hua, LI Hong. Research of Optim ization Design of Groove Diffraction Grating Profile Parameters [J]. Acta Photonica Sinica, 2010, 30(11): 3133-3139.

[4] CAI Tuo, SANG Tian, ZHAO Hua. Coupled-wave Analysis, Numerical Calculation and Discussion for Diffraction Properties of Grating [J]. Opto-Electronic Engineering, 2010, 37(4): 141-146.

[5] FANG Jing-yue, QIN Shi-qiao, WANG Xing-shu, et al. Frequency Domain Analysis of Small Angle Measurement with Moire Fringe [J]. Acta Photonica Sinica, 2010, 39(4): 709-713.

[6] YU Dao-yin, TAN Heng-ying. Engineering Optics[M]. Beijing: China Machine Press, 2002.

[7] CHAO Xiang-qun, HUANG Wei-shi, JIN Tong. Metrological Technology by Gratings [M]. Hangzhou: Zhejiang University Press, 1992.

[8] Akiya KIMURA, Kiyokazu YASUDA, Michiya MATSUSHIMA, et al. Propagation Loss Evaluation of Optical Transmission/Interconnect System with Grating Structure [C]// 2005 International Symposium on Electronics Materials and Packaging (EMAP2005), Tokyo, Japan, Dec 11-14, 2005: 125-128.