• Laser & Optoelectronics Progress
  • Vol. 59, Issue 23, 2320001 (2022)
Yuan Li, Junhong Su*, Junqi Xu, Lihong Yang, and Guoliang Yang
Author Affiliations
  • Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, College of Opto-Electronic Engineering, Xi'an Technological University, Xi'an 710021, Shaanxi , China
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    DOI: 10.3788/LOP202259.2320001 Cite this Article Set citation alerts
    Yuan Li, Junhong Su, Junqi Xu, Lihong Yang, Guoliang Yang. Fitting Model of Laser-Induced Damage Threshold for Optical Elements with Periodic Surface[J]. Laser & Optoelectronics Progress, 2022, 59(23): 2320001 Copy Citation Text show less
    SEM micrographs of optical element with periodic surface. (a) Top view; (b) cross-sectional view
    Fig. 1. SEM micrographs of optical element with periodic surface. (a) Top view; (b) cross-sectional view
    Schematic diagram of LIDT test system for optical elements
    Fig. 2. Schematic diagram of LIDT test system for optical elements
    Fitting result of laser-induced damage threshold
    Fig. 3. Fitting result of laser-induced damage threshold
    Itemn
    12345678910
    Calculated range of energy /mJ71.257680.7585.590.259599.75104.5109.25114
    ----------
    78.758489.2594.599.75105110.25115.5120.75126
    Standard fluence p /mJ14.9315.9216.9217.9118.9119.9020.9021.8922.8923.89
    L¯i /(J·cm-214.8115.9916.9518.0218.8319.9620.7721.8123.9724.38
    upi) /mJ0.118-0.066-0.031-0.1060.079-0.0560.1300.085-1.080-0.495
    Damage fraction probability1/82/114/155/235/196/167/166/134/95/8
    ki81115231916161398
    P /%12.518.226.721.726.337.543.846.244.462.5
    Table 1. Calculation results of damage probability
    ItemUncertainty
    sb0.343
    sL0.429
    ucrelLth) /%2.630
    Table 2. Calculation results of energy density uncertainty for linear fitting
    ItemUncertainty
    ucrel2q) /%0
    ucrel2Lth) /%0.029
    ucrel2Lth) /%0.069
    ucrelFth) /%3.13
    c=2,LIDT /(J·cm-213.06±6.26%
    c=3,LIDT /(J·cm-213.06±9.39%
    Table 3. Calculation results of LIDT uncertainties of linear fitting two-dimensional periodic structure thin films
    Yuan Li, Junhong Su, Junqi Xu, Lihong Yang, Guoliang Yang. Fitting Model of Laser-Induced Damage Threshold for Optical Elements with Periodic Surface[J]. Laser & Optoelectronics Progress, 2022, 59(23): 2320001
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