Yuan Li, Junhong Su, Junqi Xu, Lihong Yang, Guoliang Yang. Fitting Model of Laser-Induced Damage Threshold for Optical Elements with Periodic Surface[J]. Laser & Optoelectronics Progress, 2022, 59(23): 2320001

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- Laser & Optoelectronics Progress
- Vol. 59, Issue 23, 2320001 (2022)

Fig. 1. SEM micrographs of optical element with periodic surface. (a) Top view; (b) cross-sectional view

Fig. 2. Schematic diagram of LIDT test system for optical elements

Fig. 3. Fitting result of laser-induced damage threshold
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Table 1. Calculation results of damage probability
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Table 2. Calculation results of energy density uncertainty for linear fitting
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Table 3. Calculation results of LIDT uncertainties of linear fitting two-dimensional periodic structure thin films

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