Yi-Tian CHENG, Wan-Qi QIU, Ke-Song ZHOU, Zhong-Wu LIU, Dong-Ling JIAO, Xi-Chun ZHONG, Hui ZHANG. Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering Al+α-Al2O3 Target [J]. Journal of Inorganic Materials, 2019, 34(8): 862

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- Journal of Inorganic Materials
- Vol. 34, Issue 8, 862 (2019)
Abstract

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