In a large Numerical Aperture (NA) deep Ultraviolet (DUV) optical system, Antireflection (AR) coated optical components with very wide Angle of Incidence (AOI) are used. By employing LaF3/MgF2 as the material combination, we designed three AR thin films that can be used for coating on the wide-angle DUV components with 3-, 5-, and 7-layer structures. Experimentally, we deposited thin films on fused silica substrates by using the thermal boat evaporation, and then measured their spectral properties with a DUV spectrophotometer. The experimental results indicate that the DUV AR coatings with high transmittance in a wide range of AOI were achieved. The residual reflectance of a double-side five-layer AR coated fused silica was measured to be less than 2.5% when AOI varied from 0° to 55°, meanwhile the transmittance was measured to be larger than 98% when AOI varied from 0° to 20°.