Ultraviolet ultrashort pulses have important application value in the fields of ultrafast science and strong field physics due to their short wavelength,excellent focusing characteristics, and high peak power. Excimer laser gas as gain medium has unique advantages in amplifying ultraviolet ultrashort pulses, so using excimer lasers to amplify ultraviolet ultrashort pulses to obtain high-intensity laser output provides a new possibility for the application of ultraviolet lasers. This article introduces the features of excimer laser amplification briefly firstly, then describes the ultraviolet ultrashort excimer laser technology in units based on the amplification characteristics of excimer, and at last describes the measurement of deep ultraviolet ultrashort pulse duration as well.