In the present paper,the factors of influence on the deposition rate of CdS films prepared by close-spaced sublimation (CSS) were first studied systematically,and it was found from the experiments that the deposition rate increased with the raised temperature of sublimation source,while decreased with the raised substrate temperature and the deposition pressure. The structure,morphology and light transmittance of the prepared samples were tested subsequently,and the results show:(1) The CdS films deposited under different oxygen partial pressure all present predominating growth lattice orientation (103),and further more the films will be strengthened after annealed under CdCl 2 atmosphere.(2) The AFM images of CdS show that the films are compact and uniform in grain diameter,and thE_grain size becomes larger with the increased substrate temperature.Along with it,the film roughness was also augmented.(3) The transmittance in the shortwave region of visible light through the CdS films would be enhanced when its thickness is reduced,and that will help improve the shortwave spectral response of CdTe solar cells.Finally,the prepared CdS films were employed to fabricate CdTe solar cells,which have achieved a conversion efficiency of 10.29%,and thus the feasibility of CSS process in the manufacture of CdTe solar cells was validated primarily.