The development of silicon-based optoelectronics technology can integrate discrete active and passive components in the transmitting module and receiving module of the LiDAR system on the chip, making the LiDAR smaller in size, more stable and lower in cost, and accelerating the application of LiDAR in autonomous driving and other fields. In this paper, the basic concept and principle of LiDAR is first analyzed. Then, according to the different scanning modes, the LiDAR on silicon substrate is divided into four categories: array flash, optical phased array, lens-assisted beam steering, and slow light grating. The technical characteristics and recent progress of these four categories are described respectively. Finally, the development trend of LiDAR on silicon substrate is summarized and prospected.