Chenyang Zhang, Defeng Mo, Hongyan Xu, Yingjie Ma, Xue Li, Wenxian Su. Progress in Packaging Technology of InGaAs Avalanche Photodiode Detectors[J]. Laser & Optoelectronics Progress, 2024, 61(9): 0900009
- Laser & Optoelectronics Progress
- Vol. 61, Issue 9, 0900009 (2024)
Fig. 1. Brief progress on the scale of InGaAs single-photon detector arrays at home and abroad
![Typical packaging forms of InGaAs single-photon detector[22]. (a) Coaxial packaging; (b) dual in-line packaging; (c) pin grid array packaging](/richHtml/lop/2024/61/9/0900009/img_02.jpg)
Fig. 2. Typical packaging forms of InGaAs single-photon detector[22]. (a) Coaxial packaging; (b) dual in-line packaging; (c) pin grid array packaging
![APD dark current test curves. (a) Relationship between DCR and temperature[22]; (b) relationship between DCR and activation energy of InGaAs SPAD device[27]](/Images/icon/loading.gif){kind=icon}
Fig. 3. APD dark current test curves. (a) Relationship between DCR and temperature[22]; (b) relationship between DCR and activation energy of InGaAs SPAD device[27]
Fig. 4. Equivalent circuit models of chip and socket[33]. (a) Chip; (b) socket
Fig. 5. SPAD packaging with integrated balancing capacitor and cooling[35]
Fig. 6. Electromagnetic field distributions of coplanar waveguide and coaxial line[28]. (a) Coplanar waveguide; (b) coaxial line
Fig. 7. Schematic diagram of the temperature control module[3]
Fig. 8. Alignment methods of chip and microlens. (a) Image of alignment key and cross mark on microlens[38]; (b) image of alignment key and cross mark on the detector[38]; (c) schematic diagram of the chip and microlens alignment system[22]
Fig. 9. Schematic diagram of the optical system and its coupling efficiency curves[40]. (a) Schematic diagram of the optical system; (b) coupling efficiency curve of 105 μm/0.22 NA MMF with 100 μm diameter active region; (c) coupling efficiency curve of SMF28 with 25 μm diameter active region
Fig. 10. V-groove limit structure[43]
Fig. 11. Schematic diagram of passive coupling[44]
Fig. 12. Mounting schemes of the detector chip[45]. (a) Horizontal coupling; (b) vertical coupling
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