• Semiconductor Optoelectronics
  • Vol. 42, Issue 5, 692 (2021)
NIE Lei, HUANG Yifan, CAI Wentao, and LIU Mengran
Author Affiliations
  • [in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2021050706 Cite this Article
    NIE Lei, HUANG Yifan, CAI Wentao, LIU Mengran. Research on Internal Defect Recognition Method of TSV 3D Package Based on Thermoelectric Coupling Excitation[J]. Semiconductor Optoelectronics, 2021, 42(5): 692 Copy Citation Text show less
    References

    [1] Sicard E, Jianfei W, Shen R, et al. Recent advances in electromagnetic compatibility of 3D-ICS-Part Ⅱ[J]. IEEE Electromagnetic Compatibility Magazine, 2015, 5(1): 65-74.

    [2] Maity D K, Roy S K, Giri C. Identification of random/clustered TSV defects in 3D IC during pre-bond testing[J]. J. of Electronic Testing, 2019, 35(5): 741-759.

    [3] Wang F, Zhang Q, Zhou K, et al. Effect of cetyl-trimethyl-ammonium-bromide (CTAB) and bis(3-sulfopropyl) disulfide (SPS) on the through-silicon-via (TSV) copper filling[J]. Microelectronic Engineering, 2019, 217(9): 111109.1-111109.7.

    [4] Lee Y W, Lim H, Kang S. Grouping-based TSV test architecture for resistive open and bridge defects in 3-D-ICs[J]. IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, 2016, 99:1-1.

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    [14] He Shuaijia, Gao Hongjun, Wang Lingfeng, et al. Distribution-ally robust planning for integrated energy systems incorporating electric-thermal demand response[J]. Energy, 2020, 213: 118783.

    [15] Zhu J, Bykov V, Pagani I, et al. Specific features of eddy current analysis with ANSYS for fast plasma current decay event in W7-X[J]. Fusion Engineering and Design, 2021, 163: 112136.

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    NIE Lei, HUANG Yifan, CAI Wentao, LIU Mengran. Research on Internal Defect Recognition Method of TSV 3D Package Based on Thermoelectric Coupling Excitation[J]. Semiconductor Optoelectronics, 2021, 42(5): 692
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