Yonggang Yan, Zhengxing Wu, Zhi Li, Yuqi Tang. Traceable analysis of the performance of an ultra-fine positioning stage using a differential plane mirror interferometer[J]. Infrared and Laser Engineering, 2021, 50(11): 20210070

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- Infrared and Laser Engineering
- Vol. 50, Issue 11, 20210070 (2021)
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