Fuxin PENG, Zhongwei HU, Yu CHEN, Binhui XIE, Zhihao ZHOU. Surface crack depth detection of sapphire substrate two-sided lapping[J]. Optics and Precision Engineering, 2023, 31(14): 2060

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- Optics and Precision Engineering
- Vol. 31, Issue 14, 2060 (2023)
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