Xin-jun WAN, Song LÜ, Ke SONG, Shu-ping XIE. A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution[J]. Acta Photonica Sinica, 2020, 49(4): 0412001

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- Acta Photonica Sinica
- Vol. 49, Issue 4, 0412001 (2020)
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