Xin-jun WAN, Song LÜ, Ke SONG, Shu-ping XIE. A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution[J]. Acta Photonica Sinica, 2020, 49(4): 0412001
- Acta Photonica Sinica
- Vol. 49, Issue 4, 0412001 (2020)
Fig. 1. Schematic of stepped mirror 3D measurement system based on fringe reflection step mirror
Fig. 2. Schematic of the reverse propagation ray tracing of the fringe reflection system
Fig. 3. Simulation of the reflection ray and phase hop values and the proper structure
Fig. 4. Micron-level resolution fringe reflection 3D measurement experimental setup and physical image of the stepped mirror sample to be measured
Fig. 5. Calibration chessboard and calibration reprojection errors
Fig. 6. Reflection fringe image collected at positions 1 and 2
Fig. 7. Unwrapped horizontal and vertical phase diagrams
Fig. 8. Step mirror 3D measurement result
Fig. 9. Step mirror cross section analysis
Fig. 10. Step height measurement results of the test part from a white light interference microscope
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Table 1. Measurement results of the step height
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