Surface of Nanosecond Laser Polished Single-Crystal Silicon Improved by Two-Step Laser Irradiation

Yingming Ren; Zhiyu Zhang

doi:10.3788/AOS202242.0714004

Journals >Acta Optica Sinica >Volume 42 >Issue 7 >Page 0714004 > Article

Acta Optica Sinica
Vol. 42, Issue 7, 0714004 (2022)

Surface of Nanosecond Laser Polished Single-Crystal Silicon Improved by Two-Step Laser Irradiation

Yingming Ren^1,2 and Zhiyu Zhang^1,*

Author Affiliations

¹Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/AOS202242.0714004 Cite this Article Set citation alerts

Yingming Ren, Zhiyu Zhang. Surface of Nanosecond Laser Polished Single-Crystal Silicon Improved by Two-Step Laser Irradiation[J]. Acta Optica Sinica, 2022, 42(7): 0714004 Copy Citation Text

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Yingming Ren, Zhiyu Zhang. Surface of Nanosecond Laser Polished Single-Crystal Silicon Improved by Two-Step Laser Irradiation[J]. Acta Optica Sinica, 2022, 42(7): 0714004

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