Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design

Hanxiang JIA; Zewei SHAO; Aibin HUANG; Pingshi JIN; Xun CAO

doi:10.15541/jim20200633

Journals >Journal of Inorganic Materials >Volume 36 >Issue 5 >Page 479 > Article

Journal of Inorganic Materials
Vol. 36, Issue 5, 479 (2021)

Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design

Hanxiang JIA^1,2, Zewei SHAO^1,2, Aibin HUANG¹, Pingshi JIN¹, and Xun CAO^1,*

Author Affiliations

¹1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

²2. University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.15541/jim20200633 Cite this Article

Hanxiang JIA, Zewei SHAO, Aibin HUANG, Pingshi JIN, Xun CAO. Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design[J]. Journal of Inorganic Materials, 2021, 36(5): 479 Copy Citation Text

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AFM image of LiAlOx layer (a) and Ta2O5 layer (b) of sandwich structured electrolyte (ATA), cross-section SEM image of ATA (c) and partial enlarged detail of it (d), surface SEM image of ATA (e), and element distribution of cross-section of ECDs (f)

1. AFM image of LiAlO_x layer (a) and Ta₂O₅layer (b) of sandwich structured electrolyte (ATA), cross-section SEM image of ATA (c) and partial enlarged detail of it (d), surface SEM image of ATA (e), and element distribution of cross-section of ECDs (f)

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UV-Vis-NIR spectra (a) of Ta2O5 films deposited under different O2 ratios of 0, 5%, 10%, 15%, respectively, optical modulation (b) of ECDs during -3 V to 3 V, experimental (c) and calculated (d) transmittance spectra of sandwich structured electrolyte, in which S1 and S2 refer to two parallel samples, LAO refers to LiAlOx, TO refer to Ta2O5, and LTO refer to Li+-inserted Ta2O5, optical design for optimized thickness of ATA via software of Essential Macleod (e)

2. UV-Vis-NIR spectra (a) of Ta₂O₅ films deposited under different O₂ ratios of 0, 5%, 10%, 15%, respectively, optical modulation (b) of ECDs during -3 V to 3 V, experimental (c) and calculated (d) transmittance spectra of sandwich structured electrolyte, in which S1 and S2 refer to two parallel samples, LAO refers to LiAlO_x, TO refer to Ta₂O₅, and LTO refer to Li⁺-inserted Ta₂O₅, optical design for optimized thickness of ATA via software of Essential Macleod (e)

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3. Comparison of sputtering efficiency parameters for several typical layers of ECDs

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4. Schematic diagram of the ATA based seven-layer all-solid-state ECDs by optical design (a), color efficiency of ECDs with inset correspond to EC reaction of ECDs (b), switching speed (c) and cycle durability test (d) of ECDs

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Layer	Target	Pressure/Pa	Q_Ar : Q_O2	Power/W	Thickness/nm
LiAlO_x^a	Li-Al	2.0	40 : 10	200	~100
Ta₂O₅	Ta	0.7	45 : 5	200	~200
LiAlO_x^b	Li-Al	2.0	40 : 10	200	~100
WO_x	W	1.0	47 : 3	70	400
NiO	Ni	1.0	40 : 10	100	150
ITO	ITO	0.3	100 : 0	140	400

Table 1.

Sputtering parameters for each layer of ECDs

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Layer	Target	Power supply	Power density/(W·cm^-2)	Sputtering rate/(nm·min^-1)	Sputtering efficiency/((nm·min^-1)/(W·cm^-2))	Ref.
Ta₂O₅	Ta₂O₅	RF	0.57	2.7	4.74	[23]
Ta₂O₅	Ta	DC	0.89	15	16.85	This work
LiTaO₃	LiTaO₃	RF	0.48	1.2	2.50	[24]
LiAlO_x	Li-Al	DC	0.16	1	6.25	This work
WO_x	WO₃	RF	1.78	5	2.81	[25]
WO_x	W	DC	0.40	16	40	This work
NiO	NiO	RF	0.64	3.6	5.63	[26]
NiO	Ni	DC	0.32	5	15.63	This work