Multi-regularization image restoration method for X-ray images of integrated circuit

Ge MA; Sen LIN; Zhifu LI; Zhijia ZHAO; Tao ZOU

doi:10.37188/OPE.20223022.2913

Journals >Optics and Precision Engineering >Volume 30 >Issue 22 >Page 2913 > Article

Optics and Precision Engineering
Vol. 30, Issue 22, 2913 (2022)

Multi-regularization image restoration method for X-ray images of integrated circuit

Ge MA, Sen LIN, Zhifu LI, Zhijia ZHAO, and Tao ZOU^*

Author Affiliations

School of Mechanical and Electrical Engineering， Guangzhou University， Guangzhou510006， China

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DOI: 10.37188/OPE.20223022.2913 Cite this Article

Ge MA, Sen LIN, Zhifu LI, Zhijia ZHAO, Tao ZOU. Multi-regularization image restoration method for X-ray images of integrated circuit[J]. Optics and Precision Engineering, 2022, 30(22): 2913 Copy Citation Text

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Fig. 1. X-ray imaging schematic diagram and X-ray equipment used in this paper

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Fig. 2. Standard grayscale images

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Fig. 3. Restored results of capacitance element image

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Fig. 4. Restored results of welding spot 1

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Fig. 5. Restored results of welding spot 2

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	Methods	MSE	PSNR	SSIM
Boat	Isotropic D-ADMM	45.85	31.55	0.836 7
	Anisotropic D-ADMM	40.49	32.10	0.857 7
	Isotropic proposed method	31.03	33.25	0.886 2
	Anisotropic proposed method	31.25	33.22	0.885 8
Cameraman	Isotropic D-ADMM	30.92	33.26	0.844 2
	Anisotropic D-ADMM	24.90	34.20	0.885 4
	Isotropic proposed method	12.69	37.13	0.948 8
	Anisotropic proposed method	12.87	37.07	0.948 8
Lena	Isotropic D-ADMM	34.52	32.78	0.835 6
	Anisotropic D-ADMM	29.04	33.53	0.867 5
	Isotropic proposed method	20.42	35.06	0.909 5
	Anisotropic proposed method	20.32	35.09	0.910 0
Peppers	Isotropic D-ADMM	36.56	32.54	0.818 8
	Anisotropic D-ADMM	31.44	33.19	0.844 7
	Isotropic proposed method	26.39	33.95	0.876 7
	Anisotropic proposed method	26.42	33.95	0.876 5

Table 1. Experimental results of standard gray images

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	Capacitance element			Welding spot 1			Welding spot 2
	LS	GMG	EI	LS	GMG	EI	LS	GMG	EI
Isotropic D-ADMM	0.037	0.008 8	0.085	0.025	0.005 3	0.048	0.015	0.003 4	0.032
Anisotropic D-ADMM	0.037	0.008 6	0.084	0.024	0.005 1	0.046	0.015	0.003 3	0.03
Method of reference ［4］	0.029	0.006 6	0.07	0.014	0.002 7	0.028	0.013	0.002 2	0.022
Isotropic proposed method	0.049	0.010 7	0.092	0.047	0.008 8	0.059	0.032	0.006	0.040
Anisotropic proposed method	0.049	0.010 7	0.091	0.047	0.008 8	0.058	0.032	0.006	0.039

Table 2. Experimental results of three integrated circuit X-ray images

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	1			2
	LS	GMG	EI	LS	GMG	EI
Isotropic D-ADMM	0.024	0.005	0.051	0.032	0.008	0.080
Anisotropic D-ADMM	0.024	0.005	0.048	0.033	0.008	0.077
Method of reference ［4］	0.017	0.003	0.034	0.025	0.006	0.064
Isotropic proposed method	0.045	0.009	0.060	0.053	0.011	0.089
Anisotropic proposed method	0.045	0.009	0.059	0.054	0.011	0.088
	3			4
	LS	GMG	EI	LS	GMG	EI
Isotropic D-ADMM	0.031	0.006	0.055	0.042	0.009	0.075
Anisotropic D-ADMM	0.030	0.006	0.052	0.041	0.008	0.072
Method of reference ［4］	0.016	0.003	0.030	0.018	0.004	0.038
Isotropic proposed method	0.052	0.010	0.061	0.072	0.014	0.089
Anisotropic proposed method	0.052	0.009	0.060	0.072	0.014	0.088
	5			6
	LS	GMG	EI	LS	GMG	EI
Isotropic D-ADMM	0.027	0.006	0.053	0.025	0.005	0.048
Anisotropic D-ADMM	0.027	0.006	0.051	0.024	0.005	0.046
Method of reference ［4］	0.017	0.004	0.037	0.014	0.003	0.028
Isotropic proposed method	0.046	0.009	0.062	0.047	0.009	0.059
Anisotropic proposed method	0.046	0.009	0.061	0.047	0.009	0.058
	7			8
	LS	GMG	EI	LS	GMG	EI
Isotropic D-ADMM	0.036	0.008	0.069	0.028	0.006	0.055
Anisotropic D-ADMM	0.035	0.007	0.066	0.027	0.006	0.052
Method of reference ［4］	0.018	0.004	0.039	0.016	0.003	0.033
Isotropic proposed method	0.063	0.012	0.081	0.050	0.010	0.066
Anisotropic proposed method	0.063	0.012	0.080	0.050	0.010	0.065

Table 3. Another ten integrated circuit X-ray images experimental results

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	9			10
	LS	GMG	EI	LS	GMG	EI
Isotropic D-ADMM	0.026	0.006	0.052	0.032	0.007	0.061
Anisotropic D-ADMM	0.025	0.005	0.050	0.031	0.007	0.058
Method of reference ［4］	0.017	0.003	0.034	0.016	0.003	0.034
Isotropic proposed method	0.047	0.009	0.062	0.056	0.011	0.072
Anisotropic proposed method	0.047	0.009	0.061	0.056	0.011	0.071

Table 3. Another ten integrated circuit X-ray images experimental results

Ge MA, Sen LIN, Zhifu LI, Zhijia ZHAO, Tao ZOU. Multi-regularization image restoration method for X-ray images of integrated circuit[J]. Optics and Precision Engineering, 2022, 30(22): 2913

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