• Journal of Applied Optics
  • Vol. 45, Issue 3, 537 (2024)
Wanhong YIN1,*, Zaitian DONG1, Yunlong ZHANG1, Wentao WANG2..., Lei LIU2, Haoyuan CHEN1, Yuanyuan DUAN1, Lei WU1, Gaoping LI1, Dongyu YU1, Pei WU1, Bing YU1 and Pengcheng SUN1|Show fewer author(s)
Author Affiliations
  • 1Primary Optical Metrology Station of National Defense Science and Technology Industry, Xi'an Institute of Applied Optics, Xi'an 710065, China
  • 2Key Laboratory of Solid-State Laser Technology, The 11th Research Institute of China Electronics Technology Group Corporation, Beijing 100020, China
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    DOI: 10.5768/JAO202445.0310007 Cite this Article
    Wanhong YIN, Zaitian DONG, Yunlong ZHANG, Wentao WANG, Lei LIU, Haoyuan CHEN, Yuanyuan DUAN, Lei WU, Gaoping LI, Dongyu YU, Pei WU, Bing YU, Pengcheng SUN. Measurement method of beam quality factor β for high energy laser[J]. Journal of Applied Optics, 2024, 45(3): 537 Copy Citation Text show less
    Schematic diagram of orthogonal slit scanning in rotary roller-type
    Fig. 1. Schematic diagram of orthogonal slit scanning in rotary roller-type
    Schematic diagram of measuring device of high energy laser beam quality factor β
    Fig. 2. Schematic diagram of measuring device of high energy laser beam quality factor β
    Physical picture of measuring device of developed high energy laser beam quality factor β
    Fig. 3. Physical picture of measuring device of developed high energy laser beam quality factor β
    Verification principle of beam quality factor β
    Fig. 4. Verification principle of beam quality factor β
    衍射极限倍数激光波长1.3 μm
    光斑直径/μm相机上像素数
    150.753
    2101.507
    3152.2610
    4203.0113
    5253.7617
    6304.5120
    7355.2624
    8406.0227
    9456.7730
    10507.5234
    Table 1. Spot diameter and its number of pixels corresponding to horizontal direction of camera
    衍射极限 倍数原始光斑 直径/μm放大4×放大20×
    光斑 直径/μm相机上 像素数光斑 直径/μm相机上 像素数
    150.75203.01131 015.0468
    2101.50406.02272 030.08135
    3152.26609.02413 045.12203
    4203.01812.03544 060.16270
    5253.761 015.04685 075.20338
    6304.511 218.05816 090.24406
    7355.261 421.06957 105.28474
    8406.021 624.061088 120.32541
    9456.771 827.071229 135.36609
    10507.522 030.0813510 150.40677
    Table 2. Spot diameter by microscopic amplification method and its number of pixels corresponding to horizontal direction of camera
    滚轮转频/Hz1.252.551020
    最小空间分辨率/μm0.0850.1700.3400.6801.360
    Table 3. Relationship between minimum spatial resolution and roller rotation frequency as well as digital sampling clock
    光束质量标准值βs光束质量测量值βt相对误差
    1.791.658%
    3.563.254%
    5.275.143%
    7.937.861%
    Table 4. Verification results of beam quality factor β
    不确定度分量相对不确定度/%评定方法
    光斑直径计算引入的不确定度2B类
    光学衰减系统引入的不确定度2B类
    系统等效焦距引入的不确定度0.5B类
    出光孔径测量引入的不确定度0.7B类
    激光波长引入的不确定度0.5B类
    测量重复性引入的不确定度1.0A类
    合成标准不确定度/%3.2
    扩展不确定度/%(k=2)7
    Table 5. Measuring device uncertainty assessment results of beam quality factor β
    Wanhong YIN, Zaitian DONG, Yunlong ZHANG, Wentao WANG, Lei LIU, Haoyuan CHEN, Yuanyuan DUAN, Lei WU, Gaoping LI, Dongyu YU, Pei WU, Bing YU, Pengcheng SUN. Measurement method of beam quality factor β for high energy laser[J]. Journal of Applied Optics, 2024, 45(3): 537
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