• Optics and Precision Engineering
  • Vol. 16, Issue 6, 1031 (2008)
XU Shi-jun1,2,* and REN Xiao-ling3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: Cite this Article
    XU Shi-jun, REN Xiao-ling. Optical thin-film depositing monitoring systems with four-light beams[J]. Optics and Precision Engineering, 2008, 16(6): 1031 Copy Citation Text show less
    References

    [1] KAISER N,STENFEIGL T,STENZEL O,et al..Optical coatings:trends and challenges[J].Opt.Precision Eng.,2005,13(4):389-396

    [2] HONG D M,ZHU ZH,YUE W.Optical coatings for fiber lasers[J].Opt.Precision Eng.,2005,13(4):480-482

    [3] MACLEOD H A.Monitoring of optical coatings[J].Appl.Opt.,1981,20(1):95-100

    [6] TAMI K,KIYOSHI Y.Simultaneous measurement of refractive index and thickness of thin film by polarized reflectances[J].Appl.Opt.,1990,29(34):5069-5070

    [7] BENEDIC F,BRUNO P,PIGEAT P.Real-time optical monitoring of thin film growth by in situ pyrometry through multiple layers and effective media approximation modeling[J].Appl.Phys.Lett.,2007,90(13):1341-1344

    [8] EHLERS H,GROΒ T,LAPPSCHIES M,et al..Optical broadband monitoring of thin film growth[J].Opt.Precision Eng.,2005,13(4):403-412

    [9] NAVARRO M,FANDINO J.Virtual substrate model for in-situ thin film thickness determination[J].Surface Engineering,2000,16(1):70-72

    [10] BULKIN P,DAINEKA D,KOUZNETSOV D,et al..Deposition of optical coatings with real time control by the spectroellipsometry[J].EPJ Appl.Phys.,2004,28(2):235-242

    [11] SAUERBREY G Z.Verwendung von schwingquarzen zur wagung dunner schichten und zur mikrowagung[J].Z.Phys,1959,155(2):210-217

    XU Shi-jun, REN Xiao-ling. Optical thin-film depositing monitoring systems with four-light beams[J]. Optics and Precision Engineering, 2008, 16(6): 1031
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