Liang He, Zhenlin Hu, Tianze Wang, Nan Lin, Yuxin Leng. Experimental Study on Highly Effective Broadband Extreme Ultraviolet Light Source by Spatially Confined Plasma[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0314001
- Laser & Optoelectronics Progress
- Vol. 62, Issue 3, 0314001 (2025)
Fig. 1. Layout of broadband LPP-EUV light source experiment
Fig. 2. EUV spectrometer
Fig. 3. Transmission efficiency characterization. (a) Reflectivity of Au mirror; (b) diffraction efficiency of EUV grating; (c) CCD quantum efficiency; (d) transmission efficiency of EUV spectrometer
Fig. 4. EUV spectra at different laser intensities for the first and second pulse
Fig. 5. Conversion efficiency of the first and second pulse at different laser intensities. (a) 13.5 nm (2% bandwidth) conversion efficiency; (b) total conversion efficiency of 10‒20 nm
Fig. 6. Comparison of the first and second laser pulses ablating the target surface
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Table 1. Full width at half maximum of EUV spectra at different laser intensities for the first and second pulse
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