• Laser & Optoelectronics Progress
  • Vol. 61, Issue 5, 0500005 (2024)
Yan Qi1,2, Yingjie Zhu1,2,*, Jing Zhang2,**, Yanwei Wang1,2,***..., Mi Zhou2, Chenxi Sun1,2, Boxia Yan1,2, Wei Han3 and Yu Wang1,2|Show fewer author(s)
Author Affiliations
  • 1School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
  • 2R & D Center of Optoelectronic Technology, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100094, China
  • 3Beijing Jishuitan Hospital, Beijing 100035, China
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    DOI: 10.3788/LOP231112 Cite this Article Set citation alerts
    Yan Qi, Yingjie Zhu, Jing Zhang, Yanwei Wang, Mi Zhou, Chenxi Sun, Boxia Yan, Wei Han, Yu Wang. Research Progress of Laser Beam Shaping Technology[J]. Laser & Optoelectronics Progress, 2024, 61(5): 0500005 Copy Citation Text show less
    References

    [1] Shealy D L. Historical perspective of laser beam shaping[J]. Proceedings of SPIE, 4770, 28-47(2002).

    [2] Du S J, Lu Q S, Shu B H. Preliminary study on high power laser window designed with binary optics[J]. Optical Technique, 33, 227-228, 231(2007).

    [3] Dunsky C. High-speed microvia formation with UV solid-state lasers[J]. Proceedings of the IEEE, 90, 1670-1680(2002).

    [4] Partlo W N, Tompkins P J, Dewa P G et al. Depth of focus and resolution enhancement of i-line and deep-UV lithography using annular illumination[J]. Proceedings of SPIE, 1927, 137-157(1993).

    [5] Chichkov B. Laser printing: trends and perspectives[J]. Applied Physics A, 128, 1015(2022).

    [6] Wei X, Zhao W W, Zheng T et al. Laser-modified luminescence for optical data storage[J]. Chinese Physics B, 31, 117901(2022).

    [7] Burns H S, Biegalski S R. Forensic signatures from laser isotope separation[J]. Journal of Radioanalytical and Nuclear Chemistry, 331, 4947-4952(2022).

    [8] Gao B K, Rong Y F, Chen P et al. An optical fiber probe based on multi-optical well particle capture[J]. Optoelectronics Letters, 18, 641-646(2022).

    [9] Li R F, Hu Z J, Li H T et al. All-fiber laser-self-mixing interferometer with adjustable injection intensity for remote sensing of 40 km[J]. Journal of Lightwave Technology, 40, 4863-4870(2022).

    [10] Teymour S, Kania B, Lal K et al. Energy-based devices in the treatment of acne scars in skin of color[J]. Journal of Cosmetic Dermatology, 22, 1177-1184(2023).

    [11] Tazes I, Passalidis S, Kaselouris E et al. A computational study on the optical shaping of gas targets via blast wave collisions for magnetic vortex acceleration[J]. High Power Laser Science and Engineering, 10, e31(2022).

    [12] Dickey F M. Laser beam shaping[J]. Optics and Photonics News, 14, 30-35(2003).

    [13] Dickey F M, Lizotte T E[M]. Laser beam shaping applications(2017).

    [14] Ge W G, Liu Y X, Ma S J et al. A comparison of hard-edged, super-Gaussian and serrated apertures[J]. Laser Journal, 26, 48-49(2005).

    [15] Bel’kov S A, Voronich I N, Garanin S G et al. Study of the apodization of a laser beam by serrated aperture stops for high-power installations of laser thermonuclear synthesis[J]. Journal of Optical Technology, 82, 330-338(2015).

    [16] Wang J G, Zhu Z D, Sun Z et al. Diffraction characteristics of serrated circular aperture with random radius[J]. High Power Laser and Particle Beams, 24, 1801-1805(2012).

    [17] Sizova I, Moskalev T, Mikheev L. Laser beam shaping with circular serrated apertures. I. Spatial filtering[J]. Applied Optics, 58, 4905-4909(2019).

    [18] Sizova I, Moskalev T, Stavrovskii D. Correction of shape distortions in laser beams apodized with circular serrated apertures[J]. Applied Optics, 60, 4861-4870(2021).

    [19] Guo H, Yan J F, Li X et al. Patterned graphene oxide by spatially-shaped femtosecond laser[J]. Chinese Journal of Lasers, 48, 0202018(2021).

    [20] An G, Yan J J, Liu Y. Calibration and application of optical pulse shaping system based on liquid crystal spatial light modulator[J]. Acta Photonica Sinica, 43, 0706012(2014).

    [21] Wang S Y, Liu Z, Lin P et al. Laser beam divergence control technology based on liquid crystal spatial light modulator[J]. Chinese Journal of Liquid Crystals and Displays, 37, 1430-1438(2022).

    [22] Li Y, Li Z R, Liu S X. 4f pulse-shaping system influenced by liquid crystal spatial light modulator pixel structure[J]. High Power Laser and Particle Beams, 28, 30-35(2016).

    [23] Prawiharjo J, Daga N K, Geng R et al. High fidelity femtosecond pulses from an ultrafast fiber laser system via adaptive amplitude and phase pre-shaping[J]. Optics Express, 16, 15074-15089(2008).

    [24] Wittenbecher L, Zigmantas D. Correction of Fabry-Pérot interference effects in phase and amplitude pulse shapers based on liquid crystal spatial light modulators[J]. Optics Express, 27, 22970-22982(2019).

    [25] Zhai Z S, Zhang Y, Lü Q H et al. Research on beam shaping method based on combined grating[J]. Chinese Journal of Lasers, 49, 1305001(2022).

    [26] Chen J, Huang Z X, Kuang D F. Optical manipulation of micro-particles with multi-axis asymmetric structured beam[J]. Chinese Journal of Lasers, 48, 2413001(2021).

    [27] Li X Y, Qian X F, Meng N N. Optimization algorithm of diffractive optical elements for beam shaping[J]. Acta Optica Sinica, 39, 1105003(2019).

    [28] Huo J Q, Hu Y, Cheng B P. History and application of diffractive optics technology[J]. Laser & Optoelectronics Progress, 60, 0700002(2023).

    [29] Gong H P, Lü Z W, Lin D Y. Present status of laser beam spatial shaping[J]. Laser & Optronics Progress, 42, 2-5(2005).

    [30] Xiu L W, Li W Q, Yang P et al. Improved GS algorithm based on hyperbolic initial phase[J]. Acta Photonica Sinica, 51, 0405001(2022).

    [31] Yang G, Wang L, Dong B et al. On the amplitude-phase retrieval problem in an optical-system involved nonunitary transformation[J]. Optik, 75, 68-74(1987).

    [32] Wang H, Hu T, Wang Z et al. Reconstruction of power pylons from LiDAR point clouds based on structural segmentation and parameter estimation[J]. IEEE Geoscience and Remote Sensing Letters, 19, 6500205(2022).

    [33] Liu Y, Huang J H, Zhao C J et al. Experimental study on background noise suppression when focusing through scattering medium[J]. Acta Photonica Sinica, 52, 0129001(2023).

    [34] Liu W J, Pang H, Cao A X et al. Design and experiments of annular beam shaping device with low speckle noise[J]. Acta Photonica Sinica, 49, 0222001(2020).

    [35] Zhang F, Li B X, Tian L et al. Optimization of underwater optical transmission based on hadamard coding algorithm[J]. Chinese Journal of Liquid Crystals and Displays, 37, 1453-1458(2022).

    [36] Lu Y, Jiang Z F, Liu W G et al. Laser mode control in fiber with core diameter of 30 μm based on 3 × 1 photonic lantern[J]. Acta Optica Sinica, 41, 1736001(2021).

    [37] Buske P, Völl A, Eisebitt M et al. Advanced beam shaping for laser materials processing based on diffractive neural networks[J]. Optics Express, 30, 22798-22816(2022).

    [38] He Z W, Zhuang Q S, Cao H N et al. Focusing through scattering medium based on memetic algorithm[J]. Laser & Optoelectronics Progress, 58, 2429001(2021).

    [39] Hsu K H, Lin H Y. Trade-off between diffraction efficiency and uniformity for design of binary diffractive laser beam shaper[J]. Optical Review, 20, 296-302(2013).

    [40] Shao J Q, Su Z P. Design of diffractive optical elements with continuous phase distribution based on machine learning[J]. Acta Optica Sinica, 43, 0323001(2023).

    [41] Lalithambigai K, Anbarasan P M, Rajesh K B. Formation of optical needle by high NA lens axicon with dedicated complex spiral phase mask[J]. Optical and Quantum Electronics, 47, 2017-2025(2015).

    [42] Umamageswari N, Rajesh K B, Udhayakumar M et al. Tight focusing properties of spirally polarized LG (1, 1)* beam with high NA parabolic mirror[J]. Optical and Quantum Electronics, 50, 77(2018).

    [43] Zhang Y, Yang K T, Yang C C. Fabrication technology and development of binary optical elements[J]. Optical Instruments, 27, 80-85(2005).

    [44] Wang L K, Zhao Y, Yang Y et al. Two-step femtosecond laser etching for bulk micromachining of 4H-SiC membrane applied in pressure sensing[J]. Ceramics International, 48, 12359-12367(2022).

    [45] Hosseingholilou S, Dorranian D. Electrophoretic deposited gold nanoparticle thin film on silver substrate[J]. IET Optoelectronics, 17, 51-60(2023).

    [46] Häcker A V, Mohr-Weidenfeller L, Stolzenberg C F L et al. Modifications to a high-precision direct laser writing setup to improve its laser microfabrication[J]. Proceedings of SPIE, 11989, 119890U(2022).

    [47] You K Y, Fang F Z. High effective laser assisted diamond turning of binderless tungsten carbide[J]. Journal of Materials Processing Technology, 302, 117505(2022).

    [48] Sohrabi S, Pazokian H, Ghafary B et al. Superhydrophobic-antibacterial polycarbonate fabrication using excimer laser treatment[J]. Optik, 262, 169377(2022).

    [49] Wang M, Wang X F, Zhou Z C et al. High-spatial-resolution composition analysis of micro/nano-structures with a nanoscale compositional variation[J]. Nano Research, 16, 1090-1095(2023).

    [50] Ekimenkova A S, Orekhova M K, Voznesenskaya A O et al. Design of an optical system for a laser beam shaping system based on aspheric polymer lenses[J]. Journal of Optical Technology, 87, 698-702(2020).

    [51] Zhao Y, Xiang Y, Li T T. Optical design of deep ultraviolet laser irradiation system for accelerating material aging[J]. Acta Optica Sinica, 41, 0522001(2021).

    [52] Chen K. Research and design of Gaussian beam shaping system for flat-topped beam[D](2011).

    [53] Zhong X S, Tang X J, Wang G. Study on aspheric lens group in laser beam shaping system[J]. Laser & Infrared, 48, 515-518(2018).

    [54] Feng K, Li J S. Design of aspherics lenses shaping system on Gaussian beam[J]. Opto-Electronic Engineering, 40, 127-132(2013).

    [55] Chen K, Chen M, Li G et al. Numerical simulation and analysis of convex two-aspheric-mirror system that converts a Gaussian to a flattop beam[J]. Laser & Infrared, 40, 1043-1047(2010).

    [56] Li D J, Wang J C, Chen Y et al. Design of high power long-coke deep-Gaussian beam shaping system[J]. Optics and Precision Engineering, 28, 2129-2137(2020).

    [57] van Wonterghem B M, Salmon J T, Wilcox R W. Beamletpulse-generation and wavefront-control system[P].

    [58] Li C, Wang W X, Li W W et al. Drive laser shaping and transport system for photocathode RF gun[J]. High Power Laser and Particle Beams, 33, 094002(2021).

    [59] Will I. Generation of flat-top picosecond pulses by means of a two-stage birefringent filter[J]. Nuclear Instruments and Methods in Physics Research Section A, 594, 119-125(2008).

    [60] Yang H L, Meng J Q, Chen W B. High efficiency and high-energy intra-cavity beam shaping laser[J]. Laser Physics, 25, 095005(2015).

    [61] Halassi A, Driouche Y, Hamdi R et al. Generalized temporal synthesis method for a birefringent laser pulse shaper[J]. Journal of the Optical Society of America A, 37, C15-C19(2020).

    [62] Huang W H, Liu T G, Wang Z et al. Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications[J]. Journal of Vacuum Science & Technology B, 40, 022804(2022).

    [63] Luo Z, Duan J A, Guo C L. Femtosecond laser one-step direct-writing cylindrical microlens array on fused silica[J]. Optics Letters, 42, 2358-2361(2017).

    [64] Bian J, Chen F R, Ling H et al. Experimental and modeling study of controllable laser lift-off via low-fluence multiscanning of polyimide-substrate interface[J]. International Journal of Heat and Mass Transfer, 188, 122609(2022).

    [65] Lü B D, Cai B W, Zhang B. Spatial shaping and uniform irradiation on the target of high power lasers[J]. Infrared and Laser Engineering, 28, 25-28(1999).

    [66] Tai Y H, Miyamoto T. Experimental characterization of high tolerance to beam irradiation conditions of light beam power receiving module for optical wireless power transmission equipped with a fly-eye lens system[J]. Energies, 15, 7388(2022).

    [67] Zhao Y, Ding Y C. Multi-point controllable wavefront shaping based on superpixel method[J]. Acta Photonica Sinica, 50, 0929002(2021).

    [68] Guo K, Peng K, Wang W F et al. Optical film liquid variable focus microlens array[J]. Infrared and Laser Engineering, 51, 20210958(2022).

    [69] Jin Y H, Zhao Y, Jiang Y J. Microlens beam shaping and homogenizing optical system for excimer laser[J]. Chinese Journal of Lasers, 42, 0602003(2015).

    [70] Yin Z Y, Wang Y F, Jia W W et al. Performance analysis of beam integrator system based on microlens array[J]. Chinese Journal of Lasers, 39, 0702007(2012).

    [71] Zheng J Z, Yu Q X, Guan S H. Small-scale non-uniformity of cross segmented wedge array focus system[J]. Optics and Precision Engineering, 17, 38-44(2009).

    [72] Zhou Y, Zhu Q X, Huang Z Y et al. Design and experimental investigations of laser homogenization system based on cylindrical microlens array[J]. Laser & Infrared, 50, 486-492(2020).

    [73] Sanjeev A, Kapellner Y, Shbero N et al. Non-contact optical wavefront shaping for focusing light and high-resolution imaging inside and behind biological scattering medium[J]. Proceedings of SPIE, 10932, 1093204(2019).

    [74] Huang D J, Fan W, Lin Z Q. Spatial laser beam shaping using digital micromirror device[J]. Chinese Journal of Lasers, 38, 0502008(2011).

    [75] Qiu J S, Fan Z W, Tang X X. Research on spatial shaping technology of super-Gaussian flattopped distributed beam[J]. Journal of Optoelectronics·Laser, 25, 233-238(2014).

    [76] Lou Y Y, Zheng X L, Zhang S C et al. Flat-top beams spatial shaping with digital micromirror device[J]. Laser Technology, 40, 916-920(2016).

    [77] Ruyer C, Fusaro A, Debayle A et al. Influence of a random phase plate on the growth of the backward stimulated Brillouin scatter[J]. Physical Review E, 107, 035208(2023).

    [78] Li P, Ma C, Su J Q et al. Analysis of laser optimized spectrum for smoothing the focused spot by temporal and special method[J]. Chinese Journal of Lasers, 35, 534-538(2008).

    [79] Bagnoud V, Hornung J, Afshari M et al. Implementation of a phase plate for the generation of homogeneous focal-spot intensity distributions at the high-energy short-pulse laser facility PHELIX[J]. High Power Laser Science and Engineering, 7, e62(2019).

    Yan Qi, Yingjie Zhu, Jing Zhang, Yanwei Wang, Mi Zhou, Chenxi Sun, Boxia Yan, Wei Han, Yu Wang. Research Progress of Laser Beam Shaping Technology[J]. Laser & Optoelectronics Progress, 2024, 61(5): 0500005
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