Naxi Tian, Hui Jiang, Aiguo Li, Dongxu Liang, Shuai Yan. Study on Phase Compensation Mirror Used for Hard X-Ray Synchrotron Radiation[J]. Acta Optica Sinica, 2020, 40(9): 0934001
- Acta Optica Sinica
- Vol. 40, Issue 9, 0934001 (2020)
Fig. 1. Photograph of phase compensation mirror. (a) Principle of deformable mirror; (b) prototype phase compensation mirror
Fig. 2. Surface shape results of compensation mirror with a driving voltage of +500 V simulated by ANSYS. (a) Second actuator; (b) sixth actuator
Fig. 3. Comparison between simulation and measurement results of phase compensation mirror. (a) PRF; (b) center positions and FWHMs of PRFs
Fig. 4. Modulation flow chart of phase compensation mirror
Fig. 5. Comparison between measured shape error and target mirror shape of phase compensation mirror
Fig. 6. Principle of in situ phase compensation measurement for phase compensation mirror
Fig. 7. Layout of phase compensation testing system
Fig. 8. Results of in situ phase compensation. (a) Wavefront curvature errors; (b) voltage change of actuator
Fig. 9. Profiles at focal point with 4 knife-edge scans after phase compensation
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