Additive and subtractive hybrid manufacturing assisted by femtosecond adaptive optics

Erse Jia; Chen Xie; Yue Yang; Xinyu Ma; Shixian Sun; Yanfeng Li; Xueqian Zhang; Minglie Hu

doi:10.1364/PRJ.531243

[1] M. Malinauskas, A. Žukauskas, S. Hasegawa. Ultrafast laser processing of materials: from science to industry. Light Sci. Appl., 5, e16133(2016).

[2] K. Sugioka, Y. Cheng. Ultrafast lasers—reliable tools for advanced materials processing. Light Sci. Appl., 3, e149(2014).

[3] A. Y. Vorobyev, C. Guo. Direct femtosecond laser surface nano/microstructuring and its applications: direct femtosecond laser surface nano/microstructuring and its applications. Laser Photonics Rev., 7, 385-407(2013).

[4] G. Raciukaitis. Ultra-short pulse lasers for microfabrication: a review. IEEE J. Sel. Topics Quantum Electron., 27, 1100112(2021).

[5] Y.-L. Zhang, Q.-D. Chen, H. Xia. Designable 3D nanofabrication by femtosecond laser direct writing. Nano Today, 5, 435-448(2010).

[6] K. C. Phillips, H. H. Gandhi, E. Mazur. Ultrafast laser processing of materials: a review. Adv. Opt. Photonics, 7, 684-712(2015).

[7] F. Sima, K. Sugioka, R. M. Vázquez. Three-dimensional femtosecond laser processing for lab-on-a-chip applications. Nanophotonics, 7, 613-634(2018).

[8] A. Reiser, M. Lindén, P. Rohner. Multi-metal electrohydrodynamic redox 3D printing at the submicron scale. Nat. Commun., 10, 1853(2019).

[9] S. Kawata, H. B. Sun, T. Tanaka. Finer features for functional microdevices. Nature, 412, 697-698(2001).

[10] T. Frenzel, M. Kadic, M. Wegener. Three-dimensional mechanical metamaterials with a twist. Science, 358, 1072-1074(2017).

[11] D. Ge, A. Issa, S. Jradi. Advanced hybrid plasmonic nano-emitters using smart photopolymer. Photonics Res., 10, 1552-1566(2022).

[12] G. Balčas, M. Malinauskas, M. Farsari. Fabrication of glass-ceramic 3D micro-optics by combining laser lithography and calcination. Adv. Funct. Mater., 33, 2215230(2023).

[13] D. Gonzalez-Hernandez, S. Varapnickas, A. Bertoncini. Micro-optics 3D printed via multi-photon laser lithography. Adv. Opt. Mater., 11, 2201701(2023).

[14] B. Rethfeld, D. S. Ivanov, M. E. Garcia. Modelling ultrafast laser ablation. J. Phys. D, 50, 193001(2017).

[15] P. Balling, J. Schou. Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films. Rep. Prog. Phys., 76, 036502(2013).

[16] C. Kerse, H. Kalaycıoğlu, P. Elahi. Ablation-cooled material removal with ultrafast bursts of pulses. Nature, 537, 84-88(2016).

[17] K. Sugioka, J. Xu, D. Wu. Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass. Lab Chip, 14, 3447-3458(2014).

[18] C. Hnatovsky, R. S. Taylor, E. Simova. Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica. Opt. Lett., 30, 1867-1869(2005).

[19] R. R. Gattass, E. Mazur. Femtosecond laser micromachining in transparent materials. Nat. Photonics, 2, 219-225(2008).

[20] A. Plech, V. Kotaidis, M. Lorenc. Femtosecond laser near-field ablation from gold nanoparticles. Nat. Phys., 2, 44-47(2006).

[21] S. H. Chung, E. Mazur. Surgical applications of femtosecond lasers. J. Biophotonics, 2, 557-572(2009).

[22] B. N. Chicbkov, C. Momma, S. Nolte. Femtosecond, picosecond and nanosecond laser ablation of solids. Appl. Phys. A, 63, 109-115(1996).

[23] V. B. Nam, T. T. Giang, S. Koo. Laser digital patterning of conductive electrodes using metal oxide nanomaterials. Nano Converg., 7, 23(2020).

[24] Z.-C. Ma, Y.-L. Zhang, B. Han. Femtosecond-laser direct writing of metallic micro/nanostructures: from fabrication strategies to future applications. Small Methods, 2, 1700413(2018).

[25] H. Wei, Z. Wu, K. Sun. Two-photon 3D printed spring-based Fabry–Pérot cavity resonator for acoustic wave detection and imaging. Photonics Res., 11, 780-786(2023).

[26] T. Gissibl, S. Thiele, A. Herkommer. Two-photon direct laser writing of ultracompact multi-lens objectives. Nat. Photonics, 10, 554-560(2016).

[27] N. Lindenmann, G. Balthasar, D. Hillerkuss. Photonic wire bonding: a novel concept for chip-scale interconnects. Opt. Express, 20, 17667-17677(2012).

[28] M. Blaicher, M. R. Billah, J. Kemal. Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography. Light Sci. Appl., 9, 71(2020).

[29] J. Li, C. Wu, P. K. Chu. 3D printing of hydrogels: rational design strategies and emerging biomedical applications. Mater. Sci. Eng. R Rep., 140, 100543(2020).

[30] K. Sugioka. Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review. Int. J. Extrem. Manuf., 1, 012003(2019).

[31] D. Wu, S. Wu, J. Xu. Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: the concept of ship-in-a-bottle biochip. Laser Photonics Rev., 8, 458-467(2014).

[32] G. Djogo, J. Li, S. Ho. Femtosecond laser additive and subtractive micro-processing: enabling a high-channel-density silica interposer for multicore fibre to silicon-photonic packaging. Int. J. Extrem. Manuf., 1, 045002(2019).

[33] A. Van Den Berg, M. Caruel, M. Hunt. Combining two-photon lithography with laser ablation of sacrificial layers: a route to isolated 3D magnetic nanostructures. Nano Res., 16, 1441-1447(2023).

[34] P. Kunwar, Z. Xiong, Y. Zhu. Hybrid laser printing of 3D, multiscale, multimaterial hydrogel structures. Adv. Opt. Mater., 7, 1900656(2019).

[35] A. Balena, M. Bianco, F. Pisanello. Recent advances on high-speed and holographic two-photon direct laser writing. Adv. Funct. Mater., 33, 2211773(2023).

[36] J. Du, F. Li, F. Peng. Large-range and high-precision autofocus method based on an annular DOE for a laser direct writing system. Opt. Express, 30, 6981-6990(2022).

[37] P. S. Salter, M. J. Booth. Adaptive optics in laser processing. Light Sci. Appl., 8, 110(2019).

[38] J. Durnin. Exact solutions for nondiffracting beams. I. The scalar theory. J. Opt. Soc. Am. A, 4, 651-654(1987).

[39] R. Stoian, M. K. Bhuyan, G. Zhang. Ultrafast Bessel beams: advanced tools for laser materials processing. Adv. Opt. Technol., 7, 165-174(2018).

[40] M. Duocastella, C. B. Arnold. Bessel and annular beams for materials processing. Laser Photonics Rev., 6, 607-621(2012).

[41] Y. Zhang, Y. Xu, C. Tian. Terahertz spoof surface-plasmon-polariton subwavelength waveguide. Photonics Res., 6, 18-23(2018).

[42] M. Yuan, Y. Li, Y. Lu. High-performance and compact broadband terahertz plasmonic waveguide intersection. Nanophotonics, 8, 1811-1819(2019).

[43] E. Jia, C. Xie, N. Xiao. Two-photon polymerization of femtosecond high-order Bessel beams with aberration correction. Chin. Opt. Lett., 21, 071203(2023).

[44] A. Ahmadivand, B. Gerislioglu, R. Ahuja. Terahertz plasmonics: the rise of toroidal metadevices towards immunobiosensings. Mater. Today, 32, 108-130(2020).

[45] X. Yang, X. Zhao, K. Yang. Biomedical applications of terahertz spectroscopy and imaging. Trends Biotechnol., 34, 810-824(2016).

[46] T. Nagatsuma, G. Ducournau, C. C. Renaud. Advances in terahertz communications accelerated by photonics. Nat. Photonics, 10, 371-379(2016).

[47] F. J. Garcia-Vidal, L. Martín-Moreno, J. B. Pendry. Surfaces with holes in them: new plasmonic metamaterials. J. Opt. A, 7, S97-S101(2005).

[48] B. Wetzel, C. Xie, P.-A. Lacourt. Femtosecond laser fabrication of micro and nano-disks in single layer graphene using vortex Bessel beams. Appl. Phys. Lett., 103, 241111(2013).

[49] A. Vasara, J. Turunen, A. T. Friberg. Realization of general nondiffracting beams with computer-generated holograms. J. Opt. Soc. Am. A, 6, 1748-1754(1989).

[50] E. Jia, C. Xie, Y. Yang. Generation and application of structured beams based on double-phase holograms [Invited]. Chin. Opt. Lett., 21, 110002(2023).

[51] X. Liu, R. Clady, D. Grojo. Engraving depth-controlled nanohole arrays on fused silica by direct short-pulse laser ablation. Adv. Mater. Inter., 10, 2202189(2023).

[52] Y. Yang, E. Jia, X. Ma. High throughput direct writing of a mesoscale binary optical element by femtosecond long focal depth beams. Light Adv. Manuf., 4, 37(2023).

[53] E. G. Gamaly, A. V. Rode, B. Luther-Davies. Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics. Phys. Plasmas, 9, 949-957(2002).

[54] K. Sokolowski-Tinten, D. Von Der Linde. Generation of dense electron-hole plasmas in silicon. Phys. Rev. B, 61, 2643-2650(2000).

[55] A. Y. Vorobyev, C. Guo. Antireflection effect of femtosecond laser-induced periodic surface structures on silicon. Opt. Express, 19, A1031-A1036(2011).

[56] W. J. MoberlyChan, D. P. Adams, M. J. Aziz. Fundamentals of focused ion beam nanostructural processing: below, at, and above the surface. MRS Bull., 32, 424-432(2007).

[57] X. Zhang, Y. Xu, W. Yue. Anomalous surface wave launching by handedness phase control. Adv. Mater., 27, 7123-7129(2015).

[58] https://www.shiyanjia.com. https://www.shiyanjia.com

微信扫一扫：分享

微信扫一扫：分享