Guangyu CHEN, Mingyong HU, Chuanlong YANG, Zhiwei FENG, Jianfeng XU, Qian BAI, Jinlong CUI. Research on compensation detection method for high⁃order convex aspheric surface[J]. Chinese Journal of Quantum Electronics, 2024, 41(1): 57
- Chinese Journal of Quantum Electronics
- Vol. 41, Issue 1, 57 (2024)
Fig. 1. Schematic diagram of the experimental scheme
Fig. 2. Schematic diagram of compensation detection optical path
Fig. 3. Shaded model of compensation detection system
Fig. 4. Wavefront diagram of compensation detection system
Fig. 5. Spot diagram of compensation detection system
Fig. 6. Flow chart of tolerance analysis
Fig. 7. Picture of high-order convex aspherical mirror
Fig. 8. Interference pattern
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Table 1. Structure parameters of compensation detection system
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Table 2. Tolerance parameters of lens surface
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Table 3. Tolerance parameters of the components
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Table 4. Analysis results using Monte⁃Carlo method
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