Huang Wei-Wei, Wang Xiangyuan, Meng Yixuan, Li Linlin, Zhang Xinquan, Ren Mingjun, Zhu Li-Min. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey[J]. International Journal of Extreme Manufacturing, 2024, 6(6): 62007

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- International Journal of Extreme Manufacturing
- Vol. 6, Issue 6, 62007 (2024)
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