• Chinese Optics Letters
  • Vol. 23, Issue 3, 033602 (2025)
Guoliang Chen1, Houan Teng1, Jian Chen1, and Qiwen Zhan1,2,3,*
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Zhangjiang Laboratory, Shanghai 201204, China
  • 3International Institute for Sustainability with Knotted Chiral Meta Matter (WPI-SKCM2), Hiroshima University, Hiroshima 739-8526, Japan
  • show less
    DOI: 10.3788/COL202523.033602 Cite this Article Set citation alerts
    Guoliang Chen, Houan Teng, Jian Chen, Qiwen Zhan, "Fabrication of sub-diffraction limit high-aspect-ratio nanostructures via laser direct writing," Chin. Opt. Lett. 23, 033602 (2025) Copy Citation Text show less
    References

    [1] E. Skliutas, M. Lebedevaite, E. Kabouraki et al. Polymerization mechanisms initiated by spatio-temporally confined light. Nanophotonics, 10, 1211(2021).

    [2] H. Wang, W. Zhang, D. Ladika et al. Two-photon polymerization lithography for optics and photonics: fundamentals, materials, technologies, and applications. Adv. Funct. Mater., 33, 2214211(2023).

    [3] D. T. Haluzan, D. M. Klymyshyn, M. Börner et al. Stiction issues and actuation of RF LIGA-MEMS variable capacitors. Microsyst. Technol., 14, 1709(2008).

    [4] N. Buch-Månson, A. Spangenberg, L. P. C. Gomez et al. Rapid prototyping of polymeric nanopillars by 3D direct laser writing for controlling cell behavior. Sci. Rep., 7, 9247(2017).

    [5] J. Liu, B. Cai, J. Zhu et al. A novel device of passive and fixed alignment of optical fiber. Microsyst. Technol., 10, 269(2004).

    [6] A. Jaiswal, C. K. Rastogi, S. Rani et al. Two decades of two-photon lithography: Materials science perspective for additive manufacturing of 2D/3D nano-microstructures. Iscience, 26, 106374(2023).

    [7] Z. Huang, G. Chi-Pong Tsui, Y. Deng et al. Two-photon polymerization nanolithography technology for fabrication of stimulus-responsive micro/nano-structures for biomedical applications. Nanotechnol. Rev., 9, 1118(2020).

    [8] B. Wu, A. Kumar, S. Pamarthy. High aspect ratio silicon etch: a review. J. Appl. Phys., 108, 051101(2010).

    [9] B. Jian, H. Li, X. He et al. Two-photon polymerization-based 4D printing and its applications. Int. J. Extrem. Manuf., 6, 012001(2023).

    [10] O. L. Manzoli, A. L. Gamino, E. A. Rodrigues et al. Modeling of interfaces in two-dimensional problems using solid finite elements with high aspect ratio. Comput. Struct., 94, 70(2012).

    [11] R. D. Sochol, A. T. Higa, R. R. Janairo et al. Unidirectional mechanical cellular stimuli via micropost array gradients. J. Soft Matter, 7, 4606(2011).

    [12] K. Kulangara, A. F. Adler, H. Wang et al. The effect of substrate topography on direct reprogramming of fibroblasts to induced neurons. Biomaterials, 35, 5327(2014).

    [13] Z. Pan, C. Yan, R. Peng et al. Control of cell nucleus shapes via micropillar patterns. Biomaterials, 33, 1730(2012).

    [14] E. H. Ahn, Y. Kim, S. S. An et al. Spatial control of adult stem cell fate using nanotopographic cues. Biomaterials, 35, 2401(2014).

    [15] F. Viela, D. Granados, A. Ayuso-Sacido et al. Biomechanical cell regulation by high aspect ratio nanoimprinted pillars. Adv. Funct. Mater., 26, 5599(2016).

    [16] C. Maibohm, O. F. Silvestre, J. Borme et al. Multi-beam two-photon polymerization for fast large area 3D periodic structure fabrication for bioapplications. Sci. Rep., 10, 8740(2020).

    [17] V. J. Cadarso, N. Chidambaram, L. Jacot-Descombes et al. High-aspect-ratio nanoimprint process chains. Microsyst. Nanoeng., 3, 17017(2017).

    [18] C. Maibohm, A. Saldana-Lopez, O. F. Silvestre et al. 3D polymer architectures for the identification of optimal dimensions for cellular growth of 3D cellular models. Polymers, 14, 4168(2022).

    [19] H. Wang, Q. Ruan, H. Wang et al. Full color and grayscale painting with 3D printed low-index nanopillars. Nano Lett., 21, 4721(2021).

    [20] H. Wang, H. Wang, W. Zhang et al. Toward near-perfect diffractive optical elements via nanoscale 3D printing. ACS Nano, 14, 10452(2020).

    [21] H. Wang, C.-F. Pan, C. Li et al. Two-photon polymerization lithography for imaging optics. Int. J. Extreme Manuf., 6, 042002(2024).

    [22] Z. Li, O. Allegre, L. Li. Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus. Light Sci. Appl., 11, 339(2022).

    [23] E. Sedghamiz, M. Liu, W. Wenzel. Challenges and limits of mechanical stability in 3D direct laser writing. Nat. Commun., 13, 2115(2022).

    [24] C. Cao, Y. Qiu, L. Guan et al. Dip-in photoresist for photoinhibited two-photon lithography to realize high-precision direct laser writing on wafer. ACS Appl. Mater. Interfaces, 14, 31332(2022).

    [25] F. Xie, S. Song, L. Liang et al. Sub-100 nm pixel pitch via STED photolithography with a nanoprinting-at-expansion/employments-at-recovery strategy. Opt. Express, 31, 2892(2023).

    [26] Y. Qiu, C. Ding, G. Zhan et al. Peripheral-photoinhibition-based direct laser writing with isotropic 30 nm feature size using a pseudo 3D hollow focus. Opt. Laser Technol., 170, 110011(2024).

    [27] W. Zhang, H. Wang, H. Wang et al. Structural multi-colour invisible inks with submicron 4D printing of shape memory polymers. Nat. Commun., 12, 112(2021).

    [28] J. Y. E. Chan, Q. Ruan, R. J. H. Ng et al. Rotation-selective moiré magnification of structural color pattern arrays. ACS Nano, 13, 14138(2019).

    [29] M. Su, Y. Song. Printable smart materials and devices: strategies and applications. Chem. Rev., 122, 5144(2022).

    [30] Y. Hu, Z. Lao, B. P. Cumming et al. Laser printing hierarchical structures with the aid of controlled capillary-driven self-assembly. Proc. Natl. Acad. Sci., 112, 6876(2015).

    [31] Q. Zhan. Cylindrical vector beams: from mathematical concepts to applications. Adv. Opt. Photonics, 1, 1(2009).

    [32] M. T. Do, Q. Li, T. T. N. Nguyen et al. High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing. Microsyst. Technol., 20, 2097(2014).

    Guoliang Chen, Houan Teng, Jian Chen, Qiwen Zhan, "Fabrication of sub-diffraction limit high-aspect-ratio nanostructures via laser direct writing," Chin. Opt. Lett. 23, 033602 (2025)
    Download Citation