• Semiconductor Optoelectronics
  • Vol. 42, Issue 5, 615 (2021)
LIU Fuhao1,2, YANG Xiaoyang1, GAO Yan3, YANG Rong3..., XU Jintong1 and LI Xiangyang1,2|Show fewer author(s)
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  • 1[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2020080305 Cite this Article
    LIU Fuhao, YANG Xiaoyang, GAO Yan, YANG Rong, XU Jintong, LI Xiangyang. Fabrication and Characterization of Infrared Bolometer Based on Mn-Co-Ni-O Thin Films with Thermal Isolation Structure[J]. Semiconductor Optoelectronics, 2021, 42(5): 615 Copy Citation Text show less
    References

    [1] Rogalski A. Infrared Detector[M]. 2nd Ed. America CRC Press, 2011: 45-46.

    [2] Hou Yun,Huang Zhiming, Gao Yanqing, et al. Characterization of Mn1.56Co0.96Ni0.48O4 films for infrared detection[J]. Appl. Phys. Lett., 2008, 92(20): 202115-3.

    [3] Robert W A. Thermistor infrared detectors[J]. Proc. SPIE, 1983, 443: 95-109.

    [4] Baliga S, Jain A L, Zachofsky W. Sputter deposition and characterization of Ni-Mn-O and Ni-Co-Mn-O spinels on polymide and glass substrates[J]. Appl. Phys. A-Materials Science & Processing, 1990, 50(5): 473-477.

    [5] The Third Laboratory of Shanghai Institute of Technical Physics, Reports on Infrared Bolometer Based NTC Thermistors[R]. Internal Reports.

    [6] Baliga S, Rost M, Doctor A. Sputtered film thermistor IR detectors[J]. Proc. SPIE, 1994, 2225: 72-78.

    [7] Dannenberg R, Doctor A, Baliga S. Electrical and optical properties of Mn1.56Co0.96Ni0.48O4[J]. Proc. SPIE, 1998, 3379: 158-165.

    [8] Chen C, Yi X, Zhao X, et al. Characterizations of VO2-based un-cooled microbolometer linear array[J]. Sensors and Actuators A: Physical, 2001, 90: 212-214.

    [9] Umadevi P, Nagendera C L. Preparation and characterization of transition metal oxide micro-thermistors and their application to immersed thermistor bolometer infrared detectors[J]. Sensors and Actuators A: Physical, 2002, 96(23): 114-124.

    [12] Shivaprasad K, Sumesh V Shobha, et al. Infrared detectors based on thin film thermistor of ternary Mn-Ni-Co-O on micro-machined thermal isolation structure[J]. Sensors & Actuators A: Physical, 2009, 153(1): 69-75.

    [13] Zerov V Y, Malyarov V G. Heat-sensitive materials for uncooled microbolometer arrays[J]. J. of Optical Technol., 2001, 68(12): 939-948.

    LIU Fuhao, YANG Xiaoyang, GAO Yan, YANG Rong, XU Jintong, LI Xiangyang. Fabrication and Characterization of Infrared Bolometer Based on Mn-Co-Ni-O Thin Films with Thermal Isolation Structure[J]. Semiconductor Optoelectronics, 2021, 42(5): 615
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