In high power excimer laser system, angular multiplexing technique is employed to achieve both high energy and narrow pulse output. In this article, angular multiplexing technique was introduced, and a multiplexing encoding method was presented. This method encoded seed beam in two steps by sequential amplitude splitting. The optical elements were arranged in rectangle arrays and piled by layers. A specific optical design was made for XeCl high power excimer laser system in this laboratory. This method of angular multiplexing encoding has advantages of compacted space, small encoding error, good compatibility with alignment and measurement, and is also easy to fabricate and assemble. This design is adopted in the system and performs well.