Mao Shanshan, Li Yanqiu, Liu Ke, Liu Lihui, Zheng Meng, Yan Xu. Optical design of high numerical aperture extreme ultraviolet lithography objective with freeform surfaces[J]. Infrared and Laser Engineering, 2019, 48(8): 814002

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- Infrared and Laser Engineering
- Vol. 48, Issue 8, 814002 (2019)
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