For the problem that core sensitive unit of integrated optic gyro is difficult to realize integration and high sensitivity, a program of fabricating silica wedge-resonator was proposed. Through the theoretical analysis, the ultimate resolution of the gyro caused by the photo-detector shot noise was proportional to the product of the diameter and the quality factor of the resonant cavity. Wedge cavity of 1.5 cm diameter and 22° wedge angle was produced by MEMS(micro-electromechanical systems) process; resonant cavities with different wedge angles were acquired by controlling the mask layer parameters; the relationship between mask layer parameters and wedge angles quality was discussed. Through the coupling test, the quality factor of the resonator is 2×10⁶, the theoretical sensitivity of 6 (°)/h is achieved for the gyroscope based on the resonator fabricated.