• Infrared and Laser Engineering
  • Vol. 54, Issue 2, 20240519 (2025)
Zhuorui TANG, Chaobin MAO, Yinghuai ZHANG, Chang FENG..., Minyan QIU, Cheng HU and Xin ZHANG*|Show fewer author(s)
Author Affiliations
  • Ji Hua Laboratory, Foshan 528253, China
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    DOI: 10.3788/IRLA20240519 Cite this Article
    Zhuorui TANG, Chaobin MAO, Yinghuai ZHANG, Chang FENG, Minyan QIU, Cheng HU, Xin ZHANG. CGH compensation surface testing technology for high-order SiC aspherical secondary mirror[J]. Infrared and Laser Engineering, 2025, 54(2): 20240519 Copy Citation Text show less
    The optical path diagram of CGH compensation testing of the secondary mirror
    Fig. 1. The optical path diagram of CGH compensation testing of the secondary mirror
    The optical path design diagram of CGH null compensation high-order aspheric secondary mirror
    Fig. 2. The optical path design diagram of CGH null compensation high-order aspheric secondary mirror
    Design residual of the main area
    Fig. 3. Design residual of the main area
    Fringe diagram of the main area of CGH designed for high-order aspherical secondary mirror
    Fig. 4. Fringe diagram of the main area of CGH designed for high-order aspherical secondary mirror
    Fringe diagram of CGH alignment area of high-order aspherical secondary mirror
    Fig. 5. Fringe diagram of CGH alignment area of high-order aspherical secondary mirror
    Optical path diagram of the diffraction order separation of the high-order aspherical secondary mirror
    Fig. 6. Optical path diagram of the diffraction order separation of the high-order aspherical secondary mirror
    Schematic diagram of the diffraction order separation of high-order aspherical secondary mirror
    Fig. 7. Schematic diagram of the diffraction order separation of high-order aspherical secondary mirror
    Surface map of the high-order aspherical secondary mirror interference detection results
    Fig. 8. Surface map of the high-order aspherical secondary mirror interference detection results
    Surface map of transmission wave aberration detection results of CGH
    Fig. 9. Surface map of transmission wave aberration detection results of CGH
    CGH substrate error Zernike fitting result
    Fig. 10. CGH substrate error Zernike fitting result
    Surface map of the high-order aspherical secondary mirror interference detection results after calibration
    Fig. 11. Surface map of the high-order aspherical secondary mirror interference detection results after calibration
    CGH substrateDiameter: 150 mm; Thickness: 15 mm
    Interferometer parametersReference flat; L2= 50 mm
    Aperture parametersThe distance to the back surface of CGH is 76.5 mm; The aperture diameter is 1 mm
    Auxiliary alignment area (Blue)Auxiliary alignment between CGH and interferometer; Auxiliary alignment between CGH and plane mirror; The design uses diffraction order 1 diffraction light design
    Base projection area (Purple)The reference spot is projected on the inspected surface; The diffraction order is 3
    Four spot coordinates of the projectionJ(0, +47.26), Q(+47.26, 0), K(0, −47.26), A(−47.26, 0), Unit:mm
    Table 1. The basic parameters of the optical path
    Zhuorui TANG, Chaobin MAO, Yinghuai ZHANG, Chang FENG, Minyan QIU, Cheng HU, Xin ZHANG. CGH compensation surface testing technology for high-order SiC aspherical secondary mirror[J]. Infrared and Laser Engineering, 2025, 54(2): 20240519
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