[1] J C LI, H A LIN, J X LUO. Optical design of space gravitational wave detection telescope. Chinese Optics Letters, 15, 761-769(2022).

[2] W T FAN, H C ZHAO, L FAN et al. Preliminary analysis of space gravitational wave detection telescope system technology. Acta Scientiarum Naturalium Universitatis Sunyatseni, 60, 178-185(2021).

[3] T EDWARDSM, M C W SANDFORDA, A HAMMESFAHR. LISA — a study of the ESA cornerstone mission for observing gravitational waves. Acta Astronautica, 48, 549-557(2001).

[4] SONG B L. Research on optomechanical design stray light analysis method f space gravitational wave detection telescope[D]. Changchun: Changchun Institute of Optics, Fine Mechanics Physics, Chinese Academy of Sciences, 2023. (in Chinese)

[5] IGARASHI Y, MITSUNARI T, YAMAZAKI K. Surface roughness measurement using the generalized HarveyShack scattering they the Kcrelation model[C]Proceedings of SPIE, 2021, 11782: 117821S.

[6] WANG C, WANG Q, DING G, et al. Research on detection technology of microstructure of optical surface based on total integrated scattering method[C]Proceedings of SPIE, 2015, 9449: 94493J.

[7] LV D M. Research on surface roughness detection of optical elements based on light scattering[D]. Changchun: Changchun University of Science Technology, 2017. (in Chinese)

[8] H H HOU. Method of scattering measurement on optical film. Joumal Changshu Institute of Technology(Natural Sciences), 46-50(2008).

[9] KASPER A, ROTHE H. Evaluation of insitu ARS senss f acterizing smooth rough surfaces[C]Proceedings of SPIE, 1998, 3426: 252261.

[10] NEUBERT J, SEIFERT T, CZARZKI N, et al. Fully automated angle resolved scatterometer[C]Proceedings of SPIE, 1994, 2210: 543552.

[11] G G ROSAS, D M HERNANDEZ, H WANG. Dynamic angle-limited integrated scattering (DALIS) method for measuring scattering of light from optical surfaces with random roughness. Optical and Quantum Electronics, 32, 63-75(2000).

[12] Y J SHEN, Q Z ZHU, Z M ZHANG. A scatterometer for measuring the bidirectional reflectance and transmittance of semiconductor wafers with rough surfaces. Review of Scientific Instruments, 74, 4885-4892(2003).

[13] WANG C, XIN R, SHI H, et al. Method verification f measuring surface roughness of components by angle resolved scattering method[C]Proceedings of SPIE, 2017, 10256: 1025655.

[14] YANG Z. Surface scattering measurement of optical components based optical cavity ringdown technique[D]. Chengdu: University of Electronic Science Technology of China, 2023. (in Chinese)

[15] Y H ZHANG, Z Q ZHONG, B ZHANG. Analysis of surface scattering characteristics of ultra-smooth optical components in gravitational wave detection system. Opto-Electronic Engineering, 50, 88-99(2023).

[16] ZHANG Kepeng. Research on evaluation method of optical element surface quality based on scattering measurement[D]. Chengdu: Institute of Optics Electronics, Chinese Academy of Sciences, 2019. (in Chinese)

[17] FELLER W. An Introduction to Probability They its Applications[M]. 2nd ed. Britain: John Wiley & Sons, Inc, 1971.