• Semiconductor Optoelectronics
  • Vol. 44, Issue 4, 561 (2024)
ZHANG Baili1, GAO Zhensen2,3, and GUO Hongying1
Author Affiliations
  • 1Department of Electronics, Xinzhou Normal University, Xinzhou 034000, CHN
  • 2School of Information Engineering, Guangdong University of Technology, Guangzhou 510006, CHN
  • 3Key Laboratory of Photonic Technology for Integrated Communication and Sensing, Ministry of Education, Guangzhou 510006, CHN
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    DOI: 10.16818/j.issn1001-5868.2024042901 Cite this Article
    ZHANG Baili, GAO Zhensen, GUO Hongying. Design and Experimental Test of High Temperature Pressure Sensor Based on FBG[J]. Semiconductor Optoelectronics, 2024, 44(4): 561 Copy Citation Text show less

    Abstract

    In this paper, a kind of high temperature pressure sensor based on fiber grating (FBG) is designed to meet the demand of pressure detection. Through analysis and comparison, suitable packaging materials and grating coating layers were selected, structural parameters were designed, and a three-dimensional model of the sensor packaging structure was established by finite element method (Ansys Workbench). The simulation of the model was realized by applying load. The simulation results verify the rationality of the design of the pressure transfer structure of the sensor. At the same time, based on the small deflection deformation theory of thin plate, the pressure sensitivity of the sensor is calculated, the temperature compensation method of the sensor is designed, the pressure and temperature calibration experiments are carried out, the pressure sensitivity of the sensor at different temperatures is analyzed, and the effectiveness of the sensor pressure measurement and temperature compensation method at 100~450 ℃ is proved.