Fig. 1. Schematic diagram of fringe reflection measurement

Fig. 2. Sinusoidal grating with luminance variation

Fig. 3. Tangent vector at any point on measured mirror surface

Fig. 4. Structure of FRMS

Fig. 5. FRMS

Fig. 6. Striped images reflected by measured mirror

Fig. 7. Surface normal distribution measured by using FRMS. (a) X-direction normal distribution; (b) Y-direction normal distribution

Fig. 8. Comparison of surface height distribution measured by FRMS and laser tracker. (a) surface height distribution measured by FRMS; (b) pint cloud data measured by laser tracker; (c) surface height distribution from point cloud data; (d) comparison of measurement results of surface height distribution