Gao Shengmiao, Han Peigao, Yan Kezhu. Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure[J]. Laser & Optoelectronics Progress, 2013, 50(11): 110002

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- Laser & Optoelectronics Progress
- Vol. 50, Issue 11, 110002 (2013)
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