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    Journals >Laser & Optoelectronics Progress >Volume 50 >Issue 11 >Page 110002 > Article
    • Laser & Optoelectronics Progress
    • Vol. 50, Issue 11, 110002 (2013)
    Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure
    Gao Shengmiao*, Han Peigao, and Yan Kezhu
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    DOI: 10.3788/lop50.110002 Cite this Article Set citation alerts
    Gao Shengmiao, Han Peigao, Yan Kezhu. Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure[J]. Laser & Optoelectronics Progress, 2013, 50(11): 110002 Copy Citation Text show less
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    Article index updated: Mar. 23, 2025
    The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
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    Gao Shengmiao, Han Peigao, Yan Kezhu. Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure[J]. Laser & Optoelectronics Progress, 2013, 50(11): 110002
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