Yifeng LIU, Junyang NIE, Kaixin ZHANG, Chang LIN, Min LI, Qun YAN, Jie SUN. Liquid Deposition Method of Hafnium Oxide Thin Films[J]. Optoelectronic Technology, 2023, 43(3): 212
- Optoelectronic Technology
- Vol. 43, Issue 3, 212 (2023)
Fig. 1. Process flow chart for preparing thin HfO2 films by the liquid deposition method
Fig. 2. The change of growth solution standing for 6 hours and Tyndall phenomenon
Fig. 3. The SEM images of the three HfO2 thin films
Fig. 4. Elemental composition analysis of HfO2 films
Fig. 5. Performance test of HfO2 thin films
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