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    Journals >Journal of Inorganic Materials >Volume 39 >Issue 6 >Page 715 > Article
    • Journal of Inorganic Materials
    • Vol. 39, Issue 6, 715 (2024)
    Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)Nx Thin Films: Mechanical Properties and Wear Resistance
    Rui ZHANG, Kan ZHANG*, Mengya YUAN, Xinlei GU, and Weitao ZHENG
    Author Affiliations
  • State Key Laboratory of Superhard Materials, College of Materials Science and Engineering, Jilin University, Changchun 130012, China
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    DOI: 10.15541/jim20230564 Cite this Article
    Rui ZHANG, Kan ZHANG, Mengya YUAN, Xinlei GU, Weitao ZHENG. Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)Nx Thin Films: Mechanical Properties and Wear Resistance [J]. Journal of Inorganic Materials, 2024, 39(6): 715 Copy Citation Text show less
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    Rui ZHANG, Kan ZHANG, Mengya YUAN, Xinlei GU, Weitao ZHENG. Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)Nx Thin Films: Mechanical Properties and Wear Resistance [J]. Journal of Inorganic Materials, 2024, 39(6): 715
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