Rui ZHANG, Kan ZHANG, Mengya YUAN, Xinlei GU, Weitao ZHENG. Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)Nx Thin Films: Mechanical Properties and Wear Resistance [J]. Journal of Inorganic Materials, 2024, 39(6): 715

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- Journal of Inorganic Materials
- Vol. 39, Issue 6, 715 (2024)
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