Rui ZHANG, Kan ZHANG, Mengya YUAN, Xinlei GU, Weitao ZHENG. Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)Nx Thin Films: Mechanical Properties and Wear Resistance [J]. Journal of Inorganic Materials, 2024, 39(6): 715
- Journal of Inorganic Materials
- Vol. 39, Issue 6, 715 (2024)
1. SEM images and corresponding EDS mappings of the surfaces for (a) NbMoTaW, (b) (NbMoTaW)N0.59, (c) (NbMoTaW)N0.80, and (d) (NbMoTaW)N0.95 thin films
2. Analysis of the structural change trends
3. Bond-length distributions of (NbMoTaW)Nx (x = 0.59, 0.81, 1.00)
4. Schematic diagram of charge density on the (001) plane of (NbMoTaW)Nx compounds when x = (a) 1.00, (b) 0.81, (c) 0.59
5. Trends in lattice distortions of nitrogen and metal sublattices in (NbMoTaW)Nx (x = 0.59, 0.81, 1.00) as function of nitrogen content x evaluated by two methods
6. (a) H and E values, (b) H/E and H 3/E 2 ratio values, and (c) corresponding residual stress values for (NbMoTaW)Nx thin films
7. SEM images of wear tracks at 10000 laps and corresponding EDS mappings for (a) NbMoTaW, (b) (NbMoTaW)N0.59, (c) (NbMoTaW)N0.80, and (d) (NbMoTaW)N0.95 thin films
8. Density of states (DOS) and partial density of states (PDOS) for (a) (NbMoTaW)N0.59, (b) (NbMoTaW)N0.81 and (c) (NbMoTaW)N, and (d) DOS at the Fermi level for the three thin films
9. Trend in hardness of (NbMoTaW)Nx (x = 0.59, 0.81, 1.00) with respect to lattice distortion
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