Fig. 1. System structure. LASER, 633 nm laser; VOAS, variable optical attenuators; C1 and C2, fiber collimators; PBS1 and PBS2, polarization beam splitters; OL, object lens; PA1 and PA2, pin apertures; L1–L4, lenses; M1 and M2, mirrors; camera, CMOS array; QWP1 and QWP2, quarter-wave plates; AOM1 and AOM2, acousto-optic modulators.

Fig. 2. Measurements of vibration frequency and amplitude of the ground. (a) Three groups of measurements at the same location in the laboratory. (b) Measurements at three different locations in the laboratory.

Fig. 3. Measurements of vibration frequency and amplitude of the mirror on the optical table. (a) Top view and (b) front view.

Fig. 4. Measurements of vibration frequency and amplitude. (a) X-direction, (b) Y-direction, (c) Z-direction, and (d) composition direction.

Fig. 5. Ideal sampling (blue), sampling with three sinusoidal vibrations (red), and sampling with random sinusoidal vibrations (yellow) at four different beat frequencies: (a) 5; (b) 50; (c) 400; and (d) 800 Hz.

Fig. 6. (a) Phase errors of different beat frequencies. (b) Measurement errors of different beat frequencies.

Fig. 7. (a) Measuring setup. (b) Phase-shifting interferograms and the measurement results.

Fig. 8. RMS repeatability of the measurement results.