Recently, optical resonances of nanostructured semiconductor were proved highly effective for light management in many optoelectronic devices. In this work, the monodispersed silica nanospheres with particle sizes of 270-330 nm were synthesized by modified two-step Stober method, and the nanosphere size uniformity was improved by optimizing the synthesis conditions. Then, the as-prepared nanospheres were self-assembled into monolayer as etching mask on the silicon substrate by means of constant temperature heating and evaporation. Finally, Si nanopillar-arrays were fabricated by inductively coupled plasma etching. The light reflectance spectra show that the fabricated Si nanopillar-arrays with diameters of 300-325 nm can excite the quadrupole Mie resonance, and the reflectance of lower than 5% was obtained in visible wavelengths, which show excellent light management performances and can further match the requirements of actual optoelectronic devices.